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Pharos 310 Electron Beam Exposure System: The "Wall Breaker" of Domestic High Precision Equipment

2025-03-25

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1、 The pain of "neck blockage" caused by nanoscale manufacturing

As the core equipment for achieving nanoscale precision, the high-end electron beam lithography machine market has long been monopolized by overseas giants. Domestic research institutions and enterprises not only face high procurement costs, but also face constraints in technology upgrades and after-sales support.

The Pharos 310 electron beam exposure system independently developed by Jinjing Technology has achieved a breakthrough in domestic high-end equipment with multiple international first-class technical indicators, providing researchers with a high-performance and cost-effective domestic alternative solution.

2、 Core advantage: The technological highlights of Pharos 310


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01- Ultra high precision: reliable guarantee for nanoscale processing

Electron beam spot size ≤ 2.0nm@30keV Ensure precise preparation of nanoscale patterns.

Resolution<15nm: Supports the processing of complex nanostructures and is suitable for various cutting-edge research.

Laser interferometer positioning+air floating vibration reduction system: effectively reducing the impact of environmental vibration on machining accuracy.


02- Efficient and Convenient: Improving Research Efficiency

Writing speed up to 20MHz: significantly reduces the processing time for large-area patterns.

Automatic sampling system: reach working vacuum level within 10 minutes.

Optical navigation system: Quickly locate the sample area to improve experimental efficiency.


03-Domestic substitution: Dual advantages of cost-effectiveness and service, high cost-effectiveness, and reduced research costs.

Lifetime free software upgrade: Ensure that the device is always in optimal condition.

Efficient technical support: Quickly respond to scientific research needs and provide customized solutions.



3、 Application scenario: The scientific research value of Pharos 310


With the increasing emphasis on the localization of high-end scientific instruments by the country, the localization of electron beam exposure equipment is of great significance. The Pharos 310 independently developed by Jinjing Technology not only fills the gap of high-end equipment in China, but also provides reliable tools for scientific researchers, making domestic high-precision and cutting-edge equipment a "breakthrough tool" in the field of science and technology.

Beijing Goldenscope Technology Co., Ltd.
All Rights Reserved
Beijing ICP Record No. 2024044605-1 
Beijing Goldenscope Technology Co., Ltd. All Rights Reserved Beijing ICP Record No. 2024044605-1

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